<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE ep-patent-document PUBLIC "-//EPO//EP PATENT DOCUMENT 1.5//EN" "ep-patent-document-v1-5.dtd">
<ep-patent-document id="EP15154198B8W1" file="EP15154198W1B8.xml" lang="de" country="EP" doc-number="2908614" kind="B8" correction-code="W1" date-publ="20170222" status="c" dtd-version="ep-patent-document-v1-5">
<SDOBI lang="de"><B000><eptags><B001EP>ATBECH..DKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSK..HRIS..MTNORS..SM..................</B001EP><B005EP>J</B005EP><B007EP>BDM Ver 0.1.50 (10 Nov 2016) -  2999001/0</B007EP></eptags></B000><B100><B110>2908614</B110><B120><B121>KORRIGIERTE EUROPÄISCHE PATENTSCHRIFT</B121></B120><B130>B8</B130><B132EP>B1</B132EP><B140><date>20170222</date></B140><B150><B151>W1</B151><B153>84</B153><B155><B1551>de</B1551><B1552>Bibliographie</B1552><B1551>en</B1551><B1552>Bibliography</B1552><B1551>fr</B1551><B1552>Bibliographie</B1552></B155></B150><B190>EP</B190></B100><B200><B210>15154198.4</B210><B220><date>20150206</date></B220><B240><B241><date>20160122</date></B241></B240><B250>de</B250><B251EP>de</B251EP><B260>de</B260></B200><B300><B310>102014101901</B310><B320><date>20140214</date></B320><B330><ctry>DE</ctry></B330></B300><B400><B405><date>20170222</date><bnum>201708</bnum></B405><B430><date>20150819</date><bnum>201534</bnum></B430><B450><date>20161221</date><bnum>201651</bnum></B450><B452EP><date>20160913</date></B452EP><B480><date>20170222</date><bnum>201708</bnum></B480></B400><B500><B510EP><classification-ipcr sequence="1"><text>H05K  13/08        20060101AFI20160324BHEP        </text></classification-ipcr></B510EP><B540><B541>de</B541><B542>Optisches Vermessen eines Bauelementes mit an gegenüberliegenden Seiten vorhandenen strukturellen Merkmalen</B542><B541>en</B541><B542>Optical measuring of a component with structural features on opposing sides</B542><B541>fr</B541><B542>Mesure optique d'un composant présentant des caractéristiques structurales sur des côtés opposés</B542></B540><B560><B561><text>EP-A2- 1 003 212</text></B561><B561><text>JP-A- 2013 077 648</text></B561><B561><text>US-A1- 2011 293 168</text></B561></B560></B500><B700><B720><B721><snm>Heilmann, Norbert</snm><adr><str>Simbacher Str. 15</str><city>81673 München</city><ctry>DE</ctry></adr></B721></B720><B730><B731><snm>ASM Assembly Systems GmbH &amp; Co. KG</snm><iid>101229457</iid><irf>A 3234 EP</irf><adr><str>Rupert-Mayer-Strasse 44</str><city>81379 München</city><ctry>DE</ctry></adr></B731></B730><B740><B741><snm>Dilg, Haeusler, Schindelmann 
Patentanwaltsgesellschaft mbH</snm><iid>100964928</iid><adr><str>Leonrodstrasse 58</str><city>80636 München</city><ctry>DE</ctry></adr></B741></B740></B700><B800><B840><ctry>AL</ctry><ctry>AT</ctry><ctry>BE</ctry><ctry>BG</ctry><ctry>CH</ctry><ctry>CY</ctry><ctry>CZ</ctry><ctry>DK</ctry><ctry>EE</ctry><ctry>ES</ctry><ctry>FI</ctry><ctry>FR</ctry><ctry>GB</ctry><ctry>GR</ctry><ctry>HR</ctry><ctry>HU</ctry><ctry>IE</ctry><ctry>IS</ctry><ctry>IT</ctry><ctry>LI</ctry><ctry>LT</ctry><ctry>LU</ctry><ctry>LV</ctry><ctry>MC</ctry><ctry>MK</ctry><ctry>MT</ctry><ctry>NL</ctry><ctry>NO</ctry><ctry>PL</ctry><ctry>PT</ctry><ctry>RO</ctry><ctry>RS</ctry><ctry>SE</ctry><ctry>SI</ctry><ctry>SK</ctry><ctry>SM</ctry><ctry>TR</ctry></B840><B880><date>20150819</date><bnum>201534</bnum></B880></B800></SDOBI>
</ep-patent-document>
