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(11)

EP 2 912 205 A2

(12)

(88) Date of publication A3: 24.07.2014 (43) Date of publication: 02.09.2015 Bulletin 2015/36 (21) Application number: 13779559.7 (22) Date of filing: 16.10.2013

(51) International Patent Classification (IPC):  C23C 14/06(2006.01) H01J 27/04(2006.01) H01J 37/317(2006.01) C23C 14/32(2006.01) C23C 14/22(2006.01) H01J 37/08(2006.01) C23C 14/56(2006.01) (86) International application number: PCT/EP2013/071640 (87) International publication number: WO 2014/063970 (01.05.2014 Gazette 2014/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 25.10.2012 US 201261718575 P (71) Applicant: Nitride Solutions Inc. Wichita, Kansas 67213 (US)	(72) Inventors: BRORS, Daniel Discovery Bay, California 94505 (US) CLARK, Richard Charlotte, North Carolina 28277 (US) DEMARAY, Richard Portola Valley, California 94028 (US) SLUTZ, David Bethlehem, Pennsylvania 18015 (US) (74) Representative: Bumke, Jakob Wenzel et al Greaves Brewster LLP Copa House Station Road Cheddar BS27 3AH Cheddar BS27 3AH (GB)