(19)
(11) EP 2 913 148 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
25.03.2020 Bulletin 2020/13

(45) Mention of the grant of the patent:
12.02.2020 Bulletin 2020/07

(21) Application number: 14157229.7

(22) Date of filing: 28.02.2014
(51) International Patent Classification (IPC): 
B23Q 17/24(2006.01)
G06T 7/00(2017.01)
 G01B 21/04(2006.01)
G05B 19/418(2006.01)

(54)

Method and system for analyzing process monitoring data

Verfahren und System zur Analyse von Verfahrensüberwachungsdaten

Procédé et système d'analyse de données de supervision de procédé

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(43) Date of publication of application:
02.09.2015 Bulletin 2015/36

(73) Proprietor: Hexagon Metrology (Israel) Ltd.
47282 Ramat Hasharon (IL)

(72) Inventors:
  • Vagman, Tal
    IL-Tel Aviv (IL)
  • Edo Abella, Jordi
    ES-08025 Barcelona (ES)

(74) Representative: Kaminski Harmann 
Patentanwälte AG Landstrasse 124
9490 Vaduz
9490 Vaduz (LI)


(56) References cited: : 
EP-A1- 2 535 781
JP-A- H10 143 237
US-A1- 2010 215 246
 WO-A2-2005/124317
US-A1- 2004 061 778
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).