(19)

(11)

EP 2 926 367 A1

(12)

(43) Date of publication: 07.10.2015 Bulletin 2015/41 (21) Application number: 12889427.6 (22) Date of filing: 03.12.2012

(51) International Patent Classification (IPC):  H01L 21/44(2006.01) (86) International application number: PCT/US2012/067607 (87) International publication number: WO 2014/088546 (12.06.2014 Gazette 2014/24)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (71) Applicant: NCC Nano, LLC Dallas, TX 75251 (US)	(72) Inventors: EDD, Andrew, E. Austin, TX 78727 (US) MUNSON, Charles, C. Dallas, TX 75230 (US) (74) Representative: Mannesson, Julia Emilia Silvia  Awapatent AB P.O. Box 5117 200 71 Malmö 200 71 Malmö (SE)