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(11)

EP 2 928 984 A1

(12)

(43) Date of publication: 14.10.2015 Bulletin 2015/42 (21) Application number: 13799621.1 (22) Date of filing: 06.12.2013

(51) International Patent Classification (IPC):  C09K 13/04(2006.01) C23C 18/16(2006.01) C23C 18/28(2006.01) C23C 18/22(2006.01) C23C 18/24(2006.01) C23C 18/30(2006.01) (86) International application number: PCT/EP2013/075863 (87) International publication number: WO 2014/087004 (12.06.2014 Gazette 2014/24)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 07.12.2012 LT 2012110 (71) Applicant: Atotech Deutschland GmbH 10553 Berlin (DE)	(72) Inventors: NARUSKEVICIUS, Leonas 10311 Vilnius (LT) BUDILOVSKIS, Danas 10221 Vilnius (LT) GYLIENE, Ona 07180 Vilnius (LT) TAMASAUSKAITE TAMASIUNAITE, Loreta 09216 Vilnius (LT) (74) Representative: Wonnemann, Jörg  Atotech Deutschland GmbH Patent Management Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)