(19)
(11) EP 2 935 650 A2

(12)

(88) Date of publication A3:
18.09.2014

(43) Date of publication:
28.10.2015 Bulletin 2015/44

(21) Application number: 13814058.7

(22) Date of filing: 03.12.2013
(51) International Patent Classification (IPC): 
C23C 18/12(2006.01)
(86) International application number:
PCT/EP2013/075380
(87) International publication number:
WO 2014/095347 (26.06.2014 Gazette 2014/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 18.12.2012 CH 28452012

(71) Applicant: EMPA Eidgenössische Materialprüfungs- und Forschungsanstalt
8600 Dübendorf (CH)

(72) Inventors:
  • HAGENDORFER, Harald
    CH-8057 Zürich (CH)
  • ROMANYUK, Yaroslav E.
    CH-8600 Dübendorf (CH)
  • TIWARI, Ayodhya N.
    CH-8051 Zürich (CH)

(74) Representative: Schneider Feldmann AG Patent- und Markenanwälte 
Beethovenstrasse 49 Postfach 2792
8022 Zürich
8022 Zürich (CH)

   


(54) FORMATION OF A DOPED TRANSPARENT CONDUCTIVE OXIDE LAYER BY SOLUTION DEPOSITION