(19)
(11) EP 2 939 256 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
17.03.2021 Bulletin 2021/11

(45) Mention of the grant of the patent:
13.01.2021 Bulletin 2021/02

(21) Application number: 13867455.1

(22) Date of filing: 30.12.2013
(51) International Patent Classification (IPC): 
H01L 21/677(2006.01)
(86) International application number:
PCT/US2013/078222
(87) International publication number:
WO 2014/106154 (03.07.2014 Gazette 2014/27)

(54)

SYSTEM AND METHOD FOR PROVIDING WAFER ACCESS IN A PROBE SYSTEM

SYSTEM UND VERFAHREN ZUR BEREITSTELLUNG VON WAFERZUGANG IN EINEM SONDENSYSTEM

SYSTÈME ET PROCÉDÉ POUR FOURNIR UN ACCÈS DE PLAQUETTE DANS UN SYSTÈME DE SONDES

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 31.12.2012 US 201261747703 P
27.12.2013 US 201314141812

(43) Date of publication of application:
04.11.2015 Bulletin 2015/45

(73) Proprietor: FormFactor Beaverton, Inc.
Beaverton OR 97008 (US)

(72) Inventors:
  • FEHRMANN, Frank
    01561 Priestewitz Ot Basslitz (DE)
  • HIRSCHFELD, Botho
    01108 Dresden (DE)
  • KANEV, Stojan
    01561 Thiendorf Ot Sacka (DE)

(74) Representative: Willett, Christopher David et al
Nash Matthews LLP 24 Hills Road
Cambridge CB2 1JP
Cambridge CB2 1JP (GB)


(56) References cited: : 
US-A- 5 672 239
US-A1- 2005 012 515
 US-A1- 2003 198 541
US-B1- 6 202 318
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).