| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
30.05.2014 JP 2014112800
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| (43) |
Date of publication of application: |
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02.12.2015 Bulletin 2015/49 |
| (73) |
Proprietor: EBARA CORPORATION |
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Ota-ku,
Tokyo 144-8510 (JP) |
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| (72) |
Inventors: |
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- Uchida, Hiroshi
Tokyo, 144-8510 (JP)
- Kawai, Masahito
Tokyo, 144-8510 (JP)
- Sakacho, Hiromi
Tokyo, 144-8510 (JP)
- Obuchi, Masashi
Tokyo, 144-8510 (JP)
- Isono, Miho
Tokyo, 144-8510 (JP)
|
| (74) |
Representative: Emde, Eric |
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Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5 80538 München 80538 München (DE) |
| (56) |
References cited: :
WO-A1-2014/086472 US-A1- 2009 208 336
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US-A- 1 820 150 US-B1- 6 190 121
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