| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
23.01.2013 JP 2013009733
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| (43) |
Date of publication of application: |
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02.12.2015 Bulletin 2015/49 |
| (73) |
Proprietor: Hitachi High-Tech Corporation |
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Minato-ku
Tokyo 105-6409 (JP) |
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| (72) |
Inventors: |
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- MATSUOKA, Shinya
Tokyo 105-8717 (JP)
- OGUCHI, So
Tokyo 105-8717 (JP)
- TOKIWA, Yukie
Tokyo 105-8717 (JP)
- SAKURAI, Toshinari
Tokyo 105-8717 (JP)
- NIIYAMA, Yasushi
Tokyo 105-8717 (JP)
- IIZUMI, Noriko
Tokyo 105-8717 (JP)
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| (74) |
Representative: Strehl Schübel-Hopf & Partner |
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Maximilianstrasse 54 80538 München 80538 München (DE) |
| (56) |
References cited: :
WO-A1-2004/057323 JP-A- H1 183 801 JP-A- H04 230 841 JP-A- H10 142 195 JP-A- S60 104 250 JP-A- S63 173 950 US-A- 4 713 618
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DE-A1- 3 120 773 JP-A- S6 131 951 JP-A- H04 301 556 JP-A- H10 288 592 JP-A- S62 156 553 JP-U- S6 196 363 US-A1- 2003 019 749
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