| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
| (30) |
Priority: |
30.01.2013 US 201313754413
|
| (71) |
Applicant: Cabot Microelectronics Corporation |
|
Aurora, Illinois 60504 (US) |
|
| (72) |
Inventors: |
|
- FU, Lin
Aurora, IL 60504 (US)
- GRUMBINE, Steven
Aurora, IL 60504 (US)
- STENDER, Matthias
Aurora, IL 60504 (US)
|
| (74) |
Representative: Trueman, Lucy Petra |
|
Barker Brettell LLP
100 Hagley Road
Edgbaston
Birmingham
B16 8QQ
Edgbaston
Birmingham
B16 8QQ (GB) |
|
