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EP 2 961 860 A1

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(43) Date of publication: 06.01.2016 Bulletin 2016/01 (21) Application number: 13762607.3 (22) Date of filing: 01.03.2013

(51) International Patent Classification (IPC):  C23C 28/00(2006.01) C22C 19/05(2006.01) C23C 14/16(2006.01) C23C 4/08(2006.01) F01D 5/28(2006.01) C23C 30/00(2006.01) (86) International application number: PCT/US2013/028559 (87) International publication number: WO 2014/133538 (04.09.2014 Gazette 2014/36)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (71) Applicant: Siemens Aktiengesellschaft 80333 München (DE)	(72) Inventors: KULKARNI, Anand A. Charlotte, NC 28277 (US) SHIPPER, Jonathan E. Lake Mary, Florida 32746 (US) STAMM, Werner 45481 Mülheim an der Ruhr (DE) (74) Representative: Patentanwaltskanzlei WILHELM & BECK  Prinzenstraße 13 80639 München 80639 München (DE)