(19)
(11) EP 2 963 498 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
26.07.2017 Bulletin 2017/30

(45) Mention of the grant of the patent:
31.05.2017 Bulletin 2017/22

(21) Application number: 15178235.6

(22) Date of filing: 19.01.2007
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)

(54)

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

BELICHTUNGSGERÄT, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG

APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIF

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 19.01.2006 JP 2006011506
21.02.2006 JP 2006044599
31.08.2006 JP 2006236878

(43) Date of publication of application:
06.01.2016 Bulletin 2016/01

(62) Application number of the earlier application in accordance with Art. 76 EPC:
14163526.8 / 2752714
07707109.0 / 1983555

(73) Proprietor: Nikon Corporation
Tokyo 108-6290 (JP)

(72) Inventor:
  • Shibazaki, Yuichi
    Tokyo 108-6290 (JP)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)


(56) References cited: : 
EP-A1- 1 041 357
US-A1- 2005 168 714
 EP-A1- 1 762 897
   
  • Kevin Mccarthy: "Accuracy in Positioning Systems", Reprinted from "The Motion Control Technology Conference Proceedings, March 19-21, 1991", 1 January 1991 (1991-01-01), pages 1-15, XP055110663, Retrieved from the Internet: URL:http://www.dovermotion.com/Downloads/K nowledgeCenter/Accuracy.pdf [retrieved on 2014-03-28]
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).