ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIRO..CY..TRBGCZEEHUPLSK....IS..............................JBDM Ver 0.1.59 (03 Mar 2017) - 2999001/02963498CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120170726W172deBibliographieenBibliographyfrBibliographieEP15178235.6200701192015072420151201enenen200601150620060119JP200604459920060221JP200623687820060831JP2017072620173020160106201601201705312017222017030220170726201730G03F 7/20 20060101AFI20151112BHEP deBELICHTUNGSGERÄT, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNGenEXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHODfrAPPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIFEP-A1- 1 041 357EP-A1- 1 762 897US-A1- 2005 168 714Kevin Mccarthy: "Accuracy in Positioning Systems", Reprinted from "The Motion Control Technology Conference Proceedings, March 19-21, 1991", 1 January 1991 (1991-01-01), pages 1-15, XP055110663, Retrieved from the Internet: URL:http://www.dovermotion.com/Downloads/K nowledgeCenter/Accuracy.pdf [retrieved on 2014-03-28]14163526.827527142014040407707109.0198355520070119Shibazaki, Yuichic/o NIKON CORPORATION, Intellectual Property Division, 15-3, Konan 2-chome, Minato-ku,Tokyo 108-6290JPNikon Corporation101538193182 572 a/jme15-3, Konan 2-chome Minato-kuTokyo 108-6290JPHoffmann Eitle100061036Patent- und Rechtsanwälte PartmbB Arabellastraße 3081925 MünchenDEATBEBGCHCYCZDEDKEEESFIFRGBGRHUIEISITLILTLULVMCNLPLPTROSESISKTR20160106201601