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(11) | EP 2 963 653 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
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| (54) | ELECTRICALLY CONDUCTIVE THIN FILMS |
| (57) An electrically conductive thin film includes a compound represented by Chemical
Formula 1 and having a layered crystal structure: Chemical Formula 1 MeB2 wherein, Me is Au, Al, Ag, Mg, Ta, Nb, Y, W, V, Mo, Sc, Cr, Mn, Os, Tc, Ru, Fe, Zr, or Ti. |