(19)

(11)

EP 2 964 808 A1

(12)

(43) Date of publication: 13.01.2016 Bulletin 2016/02 (21) Application number: 13877283.5 (22) Date of filing: 30.12.2013

(51) International Patent Classification (IPC):  C23C 30/00(2006.01) C23C 26/00(2006.01) (86) International application number: PCT/US2013/078183 (87) International publication number: WO 2014/137464 (12.09.2014 Gazette 2014/37)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 06.03.2013 US 201361773344 P (71) Applicant: United Technologies Corporation Hartford, CT 06103 (US)	(72) Inventor: STROCK, Christopher W. Kennebunk, Maine 04043 (US) (74) Representative: Leckey, David Herbert  Dehns St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)