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EP 2 969 186 A1

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(43) Date of publication: 20.01.2016 Bulletin 2016/03 (21) Application number: 14720807.8 (22) Date of filing: 13.03.2014

(51) International Patent Classification (IPC):  B01J 23/00(2006.01) H01L 31/0264(2006.01) B01J 23/72(2006.01) (86) International application number: PCT/US2014/026580 (87) International publication number: WO 2014/151861 (25.09.2014 Gazette 2014/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 15.03.2013 US 201313840859 14.06.2013 US 201361835399 P (71) Applicants: Nitto Denko Corporation Ibaraki-shi, Osaka 567-0041 (JP) Sanbandan, Ekambaram Carlsbad, CA 92011 (US) Zhang, Bin San Diego, CA 92128 (US)

(72) Inventors: SAMBANDAN, Ekambaram Carlsbad, California 92011 (US) ZHANG, Bin San Diego, California 92128 (US) (74) Representative: Green, Mark Charles  Urquhart-Dykes & Lord LLP The Podium 1 Eversholt Street London NW1 2DN London NW1 2DN (GB)