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EP 2 969 373 A1

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(43) Date of publication: 20.01.2016 Bulletin 2016/03 (21) Application number: 14775131.7 (22) Date of filing: 31.01.2014

(51) International Patent Classification (IPC):  B23K 26/361(2014.01) B23K 26/03(2006.01) B23K 26/064(2014.01) B23K 26/08(2006.01) (86) International application number: PCT/US2014/014306 (87) International publication number: WO 2014/158346 (02.10.2014 Gazette 2014/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 13.03.2013 US 201361780657 P (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)

(72) Inventors: DEY, Rohit Hebbal Bangalore 560024 (IN) FRANKLIN, Jeffrey L. Albuquerque, New Mexico 87107 (US) BASAPPA, Giridhar Manasanagara Bangalore 560072 (IN) KARISIDDAPPA, Marulasiddeswara Nagavara Bangalore 560045 (IN) KANKANALA, Penchala N. Los Gatos, California 95030 (US) LANE, Christopher T. Los Gatos, California 95030 (US) GEE, James M. Albuquerque, New Mexico 87122 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)