(19)

(11)

EP 2 971 226 A2

(12)

(88) Date of publication A3: 13.11.2014 (43) Date of publication: 20.01.2016 Bulletin 2016/03 (21) Application number: 14770343.3 (22) Date of filing: 13.03.2014

(51) International Patent Classification (IPC):  C23C 16/24(2006.01) (86) International application number: PCT/US2014/026628 (87) International publication number: WO 2014/151895 (25.09.2014 Gazette 2014/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 15.03.2013 US 201361801131 P 10.04.2013 US 201313860393 (71) Applicant: Plasmanano Corporation La Jolla, CA 92037 (US)	(72) Inventor: PARK, Jaeyoung La Jolla, CA 92037 (US) (74) Representative: Betten & Resch  Patent- und Rechtsanwälte PartGmbB Maximiliansplatz 14 80333 München 80333 München (DE)