OPTICAL BEAM POSITIONING UNIT FOR ATOMIC FORCE MICROSCOPE

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EP 2 972 065 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	01.06.2022 Bulletin 2022/22

(45)	Mention of the grant of the patent:
	16.02.2022 Bulletin 2022/07

(21)	Application number: 14772613.7

(22)	Date of filing: 31.03.2014

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International Patent Classification (IPC):

G01Q 20/02^(2010.01)
G01B 11/30^(2006.01)

G01Q 10/04^(2010.01)

(52)	Cooperative Patent Classification (CPC):
	G01B 11/30; G01Q 10/045; G01Q 20/02

(86)	International application number:
	PCT/US2014/000069

(87)	International publication number:
	WO 2014/158290 (02.10.2014 Gazette 2014/40)

(54)	OPTICAL BEAM POSITIONING UNIT FOR ATOMIC FORCE MICROSCOPE EINHEIT ZUR POSITIONIERUNG OPTISCHER STRAHLEN FÜR EIN ATOMKRAFTMIKROSKOP UNITÉ DE POSITIONNEMENT DE FAISCEAU OPTIQUE POUR UN MICROSCOPE À FORCE ATOMIQUE

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

14.03.2013 US 201361852231 P
06.08.2013 US 201361958849 P
12.03.2014 US 201414000001

(43)	Date of publication of application:
	20.01.2016 Bulletin 2016/03

(73)	Proprietor: Oxford Instruments Asylum Research, Inc.
	Santa Barbara, CA 93117 (US)

(72)	Inventors:
	LABUDA, Aleksander Goleta, CA 93117 (US) CLEVELAND, Jason Goleta, CA 93117 (US) WALTERS, Deron Goleta, CA 93117 (US) PROKSCH, Roger Goleta, CA 93117 (US)

(74)	Representative: Gill Jennings & Every LLP
	The Broadgate Tower 20 Primrose Street London EC2A 2ES London EC2A 2ES (GB)

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References cited: :

WO-A1-2009/066555
US-A- 5 144 150
US-A1- 2008 198 448

JP-A- 2001 304 833
US-A1- 2007 195 333
US-A1- 2008 223 117

NISHIDA SHUHEI ET AL: "Photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, vol. 27, no. 2, 1 April 2009 (2009-04-01), pages 964-968, XP012129225, ISSN: 1071-1023, DOI: 10.1116/1.3077487

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).