(19)
(11) EP 2 972 158 A1

(12)

(43) Date of publication:
20.01.2016 Bulletin 2016/03

(21) Application number: 13814287.2

(22) Date of filing: 27.11.2013
(51) International Patent Classification (IPC): 
G01J 5/04(2006.01)
G01J 5/02(2006.01)
G01J 5/20(2006.01)
G01J 5/08(2006.01)
G01J 5/10(2006.01)
(86) International application number:
PCT/US2013/072347
(87) International publication number:
WO 2014/085664 (05.06.2014 Gazette 2014/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 30.11.2012 US 201261731995 P

(71) Applicant: Robert Bosch GmbH
70442 Stuttgart (DE)

(72) Inventors:
  • SAMARAO, Ashwin, K.
    Mountain View, CA 94040 (US)
  • O'BRIEN, Gary
    Palo Alto, CA 94304 (US)
  • FEYH, Ando
    Palo Alto, CA 94306 (US)
  • PURKL, Fabian
    Palo Alto, CA 94306 (US)
  • YAMA, Gary
    Mountain View, CA 94040 (US)

(74) Representative: Bee, Joachim 
Robert Bosch GmbH, C/IPE P.O. Box 30 02 20
70442 Stuttgart
70442 Stuttgart (DE)

   


(54) MEMS INFRARED SENSOR INCLUDING A PLASMONIC LENS