(19)
(11) EP 2 973 659 A1

(12)

(43) Date of publication:
20.01.2016 Bulletin 2016/03

(21) Application number: 14764068.4

(22) Date of filing: 14.03.2014
(51) International Patent Classification (IPC): 
H01L 21/145(2006.01)
H01L 21/22(2006.01)
(86) International application number:
PCT/US2014/028937
(87) International publication number:
WO 2014/144502 (18.09.2014 Gazette 2014/38)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 15.03.2013 US 201313831670

(71) Applicant: Component Re-Engineering Company Inc.
Santa Clara, CA 95054 (US)

(72) Inventors:
  • ELLIOT, Brent D.
    California 95014 (US)
  • BALMA, Frank
    California 95033 (US)
  • ELLIOT, Alfred Grant
    California 94303 (US)
  • VEYTSER, Alexander
    California 94040 (US)
  • REX, Dennis G.
    Oregon 97544 (US)
  • SCHUSTER,Richard E.
    California 95035 (US)

(74) Representative: Boult Wade Tennant 
Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) MULTIPLE ZONE HEATER