| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
| (30) |
Priority: |
27.03.2013 EP 13161418
|
| (71) |
Applicant: Atotech Deutschland GmbH |
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10553 Berlin (DE) |
|
| (72) |
Inventors: |
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- BRÜNING, Dr. Frank
10437 Berlin (DE)
- BECK, Birgit
13503 Berlin (DE)
- LANGHAMMER, Elisa
13187 Berlin (DE)
- ETZKORN, Dr. Johannes
44892 Bochum (DE)
- MERSCHKY, Dr. Michael
10969 Berlin (DE)
- SCHULZE, Jörg
16515 Oranienburg (DE)
- LOWINSKI, Christian
16547 Birkenwerder (DE)
|
| (74) |
Representative: Wonnemann, Jörg |
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Atotech Deutschland GmbH
Patent Management
Erasmusstraße 20
10553 Berlin
10553 Berlin (DE) |
|
