ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES FOR UTILIZING SAME - Patent 3000123

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EP 3 000 123 A1

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(43)	Date of publication:
	30.03.2016 Bulletin 2016/13

(21)	Application number: 14800248.8

(22)	Date of filing: 21.05.2014

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International Patent Classification (IPC):

H01L 21/265^(2006.01)

(86)	International application number:
	PCT/US2014/039028

(87)	International publication number:
	WO 2014/190087 (27.11.2014 Gazette 2014/48)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

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Priority:

21.05.2013 US 201313898809

(71)	Applicant: ENTEGRIS, INC.
	Billerica, MA 01821 (US)

(72)	Inventors:
	MAYER, James, J. Fischer, TX 78623 (US) RAY, Richard, S. New Milford, CT 06776 (US) KAIM,Robert Brookline, MA 02446 (US) SWEENEY, Joseph, D. New Milford, CT 06776 (US)

(74)	Representative: Awapatent AB
	Junkersgatan 1 582 35 Linköping 582 35 Linköping (SE)

(54)	ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES FOR UTILIZING SAME