| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
| (30) |
Priority: |
31.05.2013 US 201313907812
|
| (71) |
Applicant: MKS Technology Inc. |
|
Laramie, Wyoming 82070 (US) |
|
| (72) |
Inventors: |
|
- WATSON, Mark
Laramie, WY 82070 (US)
- BULLER, Shane
Laramie, WY 82070 (US)
- CARRON, Keith
Laramie, WY 82070 (US)
|
| (74) |
Representative: Leman Consulting S.A. |
|
Chemin de Précossy 31
1260 Nyon
1260 Nyon (CH) |
|
