(19)

(11)

EP 3 007 858 A1

(12)

(43) Date of publication: 20.04.2016 Bulletin 2016/16 (21) Application number: 14811299.8 (22) Date of filing: 30.05.2014

(51) International Patent Classification (IPC):  B24B 37/24(2012.01) (86) International application number: PCT/US2014/040226 (87) International publication number: WO 2014/200726 (18.12.2014 Gazette 2014/51)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 13.06.2013 US 201313917422 (71) Applicant: Cabot Microelectronics Corporation Aurora, Illinois 60504 (US)	(72) Inventor: NAIR, Jayakrishnan Aurora, Illinois 60504 (US) (74) Representative: Trueman, Lucy Petra  Barker Brettell LLP 100 Hagley Road Edgbaston Birmingham B16 8QQ Birmingham B16 8QQ (GB)