APPARATUS AND PROCESS FOR MAKING TRISILYLAMINE

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EP 3 009 396 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	27.09.2017 Bulletin 2017/39

(45)	Mention of the grant of the patent:
	19.07.2017 Bulletin 2017/29

(21)	Application number: 15193282.9

(22)	Date of filing: 23.06.2014

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International Patent Classification (IPC):

C01B 21/068^(2006.01)

(54)	APPARATUS AND PROCESS FOR MAKING TRISILYLAMINE VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON TRISILYLAMIN APPAREIL ET PROCÉDÉ DE FABRICATION DE LA TRISILYLAMINE

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

28.06.2013 US 201361840940 P
22.05.2014 US 201414284983

(43)	Date of publication of application:
	20.04.2016 Bulletin 2016/16

(62)	Application number of the earlier application in accordance with Art. 76 EPC:
	14173395.6 / 2818448

(73)	Proprietor: Versum Materials US, LLC
	Tempe, AZ 85284 (US)

(72)	Inventors:
	AGARWAL, Rajiv Krishan Malvern, Pennsylvania 19355 (US) LO, Sai-Hong Andrew Allentown, Pennsylvania 18104 (US) WITHERS, JR., Howard Paul Breinigsville, Pennsylvania 18031 (US) SLUZEVICH, Joseph T. Frackville, Pennsylvania 17931 (US) HART, James Joseph Fogelsville, Pennsylvania 18051 (US)

(74)	Representative: Beck Greener
	Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)

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References cited: :

WO-A1-2013/004423

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).