METHODS OF DEPOSITING A METAL ALLOY FILM

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EP 3 014 651 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	26.12.2018 Bulletin 2018/52

(45)	Mention of the grant of the patent:
	07.11.2018 Bulletin 2018/45

(21)	Application number: 14818363.5

(22)	Date of filing: 26.06.2014

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International Patent Classification (IPC):

H01L 21/205^(2006.01)
C23C 16/18^(2006.01)
C23C 16/08^(2006.01)

H01L 21/283^(2006.01)
C23C 16/455^(2006.01)

(86)	International application number:
	PCT/US2014/044369

(87)	International publication number:
	WO 2014/210328 (31.12.2014 Gazette 2014/53)

(54)	METHODS OF DEPOSITING A METAL ALLOY FILM VERFAHREN ZUR ABLAGERUNG EINES METALLLEGIERUNGSFILMS PROCÉDÉS DE DÉPÔT D'UN FILM D'ALLIAGE DE MÉTAL

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

26.06.2013 US 201361839521 P

(43)	Date of publication of application:
	04.05.2016 Bulletin 2016/18

(73)	Proprietor: Applied Materials, Inc.
	Santa Clara, CA 95054 (US)

(72)	Inventors:
	THOMPSON, David San Jose, California 95138 (US) ANTHIS, Jeffrey W. San Jose, California 95124 (US)

(74)	Representative: Zimmermann & Partner Patentanwälte mbB
	Josephspitalstr. 15 80331 München 80331 München (DE)

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References cited: :

WO-A2-2007/133837
US-A- 4 330 433
US-A1- 2012 322 250
US-B2- 7 780 758

JP-A- 2005 503 984
US-A- 6 077 775
US-A1- 2013 115 383
US-B2- 8 192 866

DEY GANGOTRI ET AL: "Mechanism for the atomic layer deposition of copper using diethylzinc as the reducing agent: a density functional theory study using gas-phase molecules as a model.", THE JOURNAL OF PHYSICAL CHEMISTRY. A 6 SEP 2012, vol. 116, no. 35, 6 September 2012 (2012-09-06), pages 8893-8901, XP002762782, US ISSN: 1520-5215

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).