(19)
(11) EP 3 027 363 A1

(12)

(43) Date of publication:
08.06.2016 Bulletin 2016/23

(21) Application number: 14747270.8

(22) Date of filing: 17.07.2014
(51) International Patent Classification (IPC): 
B24B 37/24(2012.01)
(86) International application number:
PCT/US2014/047065
(87) International publication number:
WO 2015/017138 (05.02.2015 Gazette 2015/05)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 31.07.2013 US 201313955398

(71) Applicant: Nexplanar Corporation
Hillsboro, OR 97124 (US)

(72) Inventors:
  • HUANG, Ping
    Beaverton, Oregon 97006 (US)
  • ALLISON, William C.
    Beaverton, Oregon 97006 (US)
  • FRENTZEL, Richard
    Murrieta, California 92563 (US)
  • LEFEVRE, Paul Andre
    Portland, Oregon 97229 (US)
  • KERPRICH, Robert
    Portland, Oregon 97229 (US)
  • SCOTT, Diane
    Portland, Oregon 97212 (US)

(74) Representative: Price, Nigel John King 
J A Kemp 14 South Square Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) LOW DENSITY POLISHING PAD