(19)
(11) EP 3 036 048 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.04.2025 Bulletin 2025/14

(45) Mention of the grant of the patent:
18.08.2021 Bulletin 2021/33

(21) Application number: 14767171.3

(22) Date of filing: 18.08.2014
(51) International Patent Classification (IPC): 
B05D 3/06(2006.01)
B05D 3/04(2006.01)
 B05D 1/42(2006.01)
B05D 3/02(2006.01)
(52) Cooperative Patent Classification (CPC):
B05D 3/0466; B05D 3/0486; B05D 3/0493; B05D 3/0254; B05D 3/067; B05D 1/42
(86) International application number:
PCT/US2014/051526
(87) International publication number:
WO 2015/026735 (26.02.2015 Gazette 2015/08)

(54)

PROGRAMMABLE DEPOSITION OF THIN FILMS OF A USER-DEFINED PROFILE WITH NANOMETER SCALE ACCURACY

PROGRAMMIERBARE ABSCHEIDUNG VON DÜNNSCHICHTEN EINES BENUTZERDEFINIERTEN PROFILS MIT GENAUIGKEIT IM NANOMETERBEREICH

DÉPÔT PROGRAMMABLE DE COUCHES MINCES AYANT UN PROFIL DÉFINI PAR L'UTILISATEUR AVEC UNE PRÉCISION DE L'ORDRE DU NANOMÈTRE

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 19.08.2013 US 201361867393 P

(43) Date of publication of application:
29.06.2016 Bulletin 2016/26

(60) Divisional application:
21191641.6 / 3950148

(73) Proprietor: Board of Regents, The University of Texas System
Austin, TX 78701 (US)

(72) Inventors:
  • SREENIVASAN, Sidlgata V.
    Austin, TX 78758 (US)
  • SINGHAL, Shrawan
    Austin, TX 78758 (US)

(74) Representative: Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte 
Am Brauhaus 8
01099 Dresden
01099 Dresden (DE)


(56) References cited: : 
US-A1- 2009 243 153
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).