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(11)

EP 3 038 974 A1

(12)

(43) Date of publication: 06.07.2016 Bulletin 2016/27 (21) Application number: 14839979.3 (22) Date of filing: 26.08.2014

(51) International Patent Classification (IPC):  B81B 7/00(2006.01) H01L 21/50(2006.01) B81C 1/00(2006.01) H01L 23/48(2006.01) (86) International application number: PCT/SE2014/050973 (87) International publication number: WO 2015/030657 (05.03.2015 Gazette 2015/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 26.08.2013 SE 1350972 27.08.2013 SE 1350980 (71) Applicant: Silex Microsystems AB 175 26 Järfälla (SE)	(72) Inventors: KÄLVESTEN, Edvard S-129 38 Hägersten (SE) EBEFORS, Thorbjörn S-141 41 Huddinge (SE) SVEDIN, Niklas S-113 51 Stockholm (SE) (74) Representative: Brann AB  P.O. Box 3690 Drottninggatan 27 103 59 Stockholm 103 59 Stockholm (SE)