| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
| (30) |
Priority: |
06.09.2013 US 201361874834 P
03.09.2014 US 201414476537
|
| (71) |
Applicant: KLA - Tencor Corporation |
|
Milpitas, California 95035 (US) |
|
| (72) |
Inventors: |
|
- GERLING, John
Livermore, California 94550 (US)
- PLETTNER, Tomas
San Ramon, California 94582 (US)
- NASSER-GHODSI, Mehran
Hamilton, Massachusetts 01982-1040 (US)
|
| (74) |
Representative: Keane, Paul Fachtna |
|
FRKelly
27 Clyde Road
Dublin 4
Dublin 4 (IE) |
|
