| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
13.11.2013 US 201361903792 P
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| (43) |
Date of publication of application: |
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21.09.2016 Bulletin 2016/38 |
| (60) |
Divisional application: |
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22171315.9 |
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22171316.7 |
| (73) |
Proprietor: Brooks Automation US, LLC |
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Chelmsford, MA 01824 (US) |
|
| (72) |
Inventors: |
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- MOURA, Jairo T.
Marlboro, MA 01752 (US)
- KRISHNASAMY, Jayaraman
Chelmsford, MA 01824 (US)
|
| (74) |
Representative: Ipside |
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7-9 Allées Haussmann 33300 Bordeaux Cedex 33300 Bordeaux Cedex (FR) |
| (56) |
References cited: :
EP-A1- 0 756 373 WO-A1-2009/003196 WO-A1-2012/132850 CN-A- 101 699 728 JP-A- 2001 112 223 US-A1- 2002 125 782 US-A1- 2006 175 913 US-A1- 2010 123 426 US-A1- 2013 026 864
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EP-A2- 1 359 660 WO-A1-2009/018149 WO-A1-2013/153575 JP-A- H03 277 148 US-A- 6 109 887 US-A1- 2005 212 371 US-A1- 2008 019 816 US-A1- 2013 026 864 US-B2- 8 220 575
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