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(11)

EP 3 074 546 A1

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(43) Date of publication: 05.10.2016 Bulletin 2016/40 (21) Application number: 14802526.5 (22) Date of filing: 10.10.2014

(51) International Patent Classification (IPC):  C23C 4/10(2006.01) C23C 28/04(2006.01) C23C 4/12(2006.01) F01D 5/28(2006.01) (86) International application number: PCT/US2014/060104 (87) International publication number: WO 2015/080804 (04.06.2015 Gazette 2015/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 26.11.2013 US 201314090513 (71) Applicant: Praxair S.T. Technology, Inc. North Haven, CT 06473 (US)	(72) Inventor: PETORAK, Christopher A. Carmel, IN 46032 (US) (74) Representative: Schwan Schorer & Partner mbB  Patentanwälte Bauerstrasse 22 80796 München 80796 München (DE)