(19)

(11)

EP 3 075 003 A1

(12)

(43) Date of publication: 05.10.2016 Bulletin 2016/40 (21) Application number: 14825103.6 (22) Date of filing: 19.11.2014

(51) International Patent Classification (IPC):  H01L 21/3065(2006.01) C23F 1/00(2006.01) C23C 16/44(2006.01) (86) International application number: PCT/EP2014/075023 (87) International publication number: WO 2015/078749 (04.06.2015 Gazette 2015/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 28.11.2013 EP 13194774 (71) Applicant: Solvay SA 1120 Bruxelles (BE)	(72) Inventors: PITTROFF, Michael 30539 Hannover (DE) SCHWARZE, Thomas 31275 Ahlten (DE) JANSSEN, Christian 30161 Hannover (DE) (74) Representative: Mross, Stefan P.M. et al Solvay SA Intellectual Assets Management RIC Lyon 85 avenue des Frères Perret BP 62 69182 Saint-Fons 69182 Saint-Fons (FR)