A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER

(19)

(11)

EP 3 080 328 A1

(12)

(43)	Date of publication:
	19.10.2016 Bulletin 2016/42

(21)	Application number: 14752870.7

(22)	Date of filing: 19.08.2014

(51)

International Patent Classification (IPC):

C23C 14/04^(2006.01)
C23C 14/56^(2006.01)
B05D 3/04^(2006.01)
B05D 1/00^(2006.01)
H01L 51/56^(2006.01)

C23C 14/12^(2006.01)
C23C 14/24^(2006.01)
B05D 1/02^(2006.01)
H01L 51/00^(2006.01)
C23C 16/44^(2006.01)

(86)	International application number:
	PCT/EP2014/067673

(87)	International publication number:
	WO 2015/086168 (18.06.2015 Gazette 2015/24)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

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Priority:

10.12.2013 WO PCT/EP2013/076120

(71)	Applicant: Applied Materials, Inc.
	Santa Clara, CA 95054 (US)

(72)	Inventors:
	DIEGUEZ-CAMPO, Jose Manuel 63457 Hanau (DE) BANGERT, Stefan 36396 Steinau (DE) SCHÜSSLER, Uwe 63743 Aschaffenburg (DE) HAAS, Dieter San Jose, California 95135 (US)

(74)	Representative: Zimmermann & Partner Patentanwälte mbB
	Josephspitalstr. 15 80331 München 80331 München (DE)

(54)	A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER