(19)
(11) EP 3 080 331 A1

(12)

(43) Date of publication:
19.10.2016 Bulletin 2016/42

(21) Application number: 14780989.1

(22) Date of filing: 19.09.2014
(51) International Patent Classification (IPC): 
C23C 16/453(2006.01)
C23C 16/455(2006.01)
(86) International application number:
PCT/US2014/056467
(87) International publication number:
WO 2015/088613 (18.06.2015 Gazette 2015/24)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 12.12.2013 US 201314104796

(71) Applicant: The Boeing Company
Chicago, IL 60606-1596 (US)

(72) Inventors:
  • RANADE, Alpana
    Chicago, Illinois 60606-2016 (US)
  • MATOS, Marvi A.
    Chicago, Illinois 60606-2016 (US)

(74) Representative: Thorniley, Peter et al
Kilburn & Strode LLP 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) GRADIENT THIN FILMS