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EP 3 084 805 A1

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(43) Date of publication: 26.10.2016 Bulletin 2016/43 (21) Application number: 13870408.5 (22) Date of filing: 17.12.2013

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 21/67(2006.01) H01L 21/268(2006.01) C01B 31/04(2006.01) (86) International application number: PCT/RU2013/001130 (87) International publication number: WO 2015/094005 (25.06.2015 Gazette 2015/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (71) Applicant: Nokia Technologies OY 02610 Espoo (FI)	(72) Inventors: BESSONOV, Alexander Alexandrovich Moscow 117588 (RU) BORINI, Stefano Cambridge CB3 0JE (GB) WEI, Di Cambridge CB4 3TD (GB) WHITE, Richard Huntingdon PE28 9DY (GB) (74) Representative: Nokia Corporation  Intellectual Property Department Karakaari 7 02610 Espoo 02610 Espoo (FI)