(19)
(11) EP 3 084 829 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
25.05.2022 Bulletin 2022/21

(45) Mention of the grant of the patent:
20.04.2022 Bulletin 2022/16

(21) Application number: 14870864.7

(22) Date of filing: 17.11.2014
(51) International Patent Classification (IPC): 
H01L 29/788(2006.01)
H01L 27/11524(2017.01)
 H01L 21/28(2006.01)
H01L 27/11556(2017.01)
(52) Cooperative Patent Classification (CPC):
H01L 27/11524; H01L 27/11556; H01L 29/40114
(86) International application number:
PCT/US2014/065957
(87) International publication number:
WO 2015/094535 (25.06.2015 Gazette 2015/25)

(54)

METAL FLOATING GATE COMPOSITE 3D NAND MEMORY DEVICES AND ASSOCIATED METHODS

ZUSAMMENGESETZTE METALL-FLOATING-GATE-3D-NAND-SPEICHERVORRICHTUNGEN UND ASSOZIIERTE VERFAHREN

DISPOSITIFS MÉMOIRES NON-ET 3D COMPOSITES À GRILLE MÉTALLIQUE FLOTTANTE ET PROCÉDÉS ASSOCIÉS

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 17.12.2013 US 201314109230

(43) Date of publication of application:
26.10.2016 Bulletin 2016/43

(73) Proprietor: Intel Corporation
Santa Clara, CA 95054 (US)

(72) Inventors:
  • SIMSEK-EGE, Fatma A.
    Boise, Idaho 83709 (US)
  • RAMASWAMY, Nirmal
    Boise, Idaho 83706 (US)

(74) Representative: Rummler, Felix et al
Maucher Jenkins Seventh Floor Offices Artillery House 11-19 Artillery Row
London SW1P 1RT
London SW1P 1RT (GB)


(56) References cited: : 
KR-A- 20080 043 107
US-A1- 2007 132 004
US-A1- 2012 231 593
US-A1- 2013 049 095
 KR-A- 20130 127 793
US-A1- 2011 065 270
US-A1- 2012 231 593
US-A1- 2013 082 316
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).