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(11)

EP 3 090 461 A1

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(43) Date of publication: 09.11.2016 Bulletin 2016/45 (21) Application number: 14877037.3 (22) Date of filing: 10.12.2014

(51) International Patent Classification (IPC):  H01M 10/0562(2010.01) H01M 10/058(2010.01) H01M 4/38(2006.01) H01M 4/58(2006.01) H01M 10/052(2010.01) H01M 4/139(2010.01) H01M 4/62(2006.01) (86) International application number: PCT/US2014/069566 (87) International publication number: WO 2015/102836 (09.07.2015 Gazette 2015/27)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 02.01.2014 US 201414146446 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: SUN, Lizhong San Jose, CA 95123 (US) JIANG, Chong Cupertino, CA 95014 (US) KWAK, Byung Sung Leo Portland, OR 97229 (US) GORDON II, Joseph G. San Jose, CA 95120 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Josephspitalstr. 15 80331 München 80331 München (DE)