PHYSICAL VAPOR DEPOSITION USING ROTATIONAL SPEED SELECTED WITH RESPECT TO DEPOSITION RATE

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EP 3 097 219 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	06.01.2021 Bulletin 2021/01

(45)	Mention of the grant of the patent:
	14.10.2020 Bulletin 2020/42

(21)	Application number: 15737817.5

(22)	Date of filing: 08.01.2015

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International Patent Classification (IPC):

C23C 14/06^(2006.01)
C23C 14/08^(2006.01)
C23C 14/30^(2006.01)
C23C 14/54^(2006.01)

C23C 14/22^(2006.01)
C23C 14/24^(2006.01)
C23C 14/50^(2006.01)
F01D 15/10^(2006.01)

(86)	International application number:
	PCT/US2015/010589

(87)	International publication number:
	WO 2015/108747 (23.07.2015 Gazette 2015/29)

(54)	PHYSICAL VAPOR DEPOSITION USING ROTATIONAL SPEED SELECTED WITH RESPECT TO DEPOSITION RATE PHYSIKALISCHE DAMPFABSCHEIDUNG MIT DREHZAHLAUSWAHL HINSICHTLICH DER ABSCHEIDUNGSGESCHWINDIGKEIT DÉPÔT PHYSIQUE EN PHASE VAPEUR UTILISANT UNE VITESSE DE ROTATION CHOISIE EN FONCTION D'UNE VITESSE DE DÉPÔT

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

20.01.2014 US 201461929178 P

(43)	Date of publication of application:
	30.11.2016 Bulletin 2016/48

(60)	Divisional application:
	20201545.9

(73)	Proprietor: Raytheon Technologies Corporation
	Farmington, CT 06032 (US)

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Inventors:

TRUBELJA, Mladen F.
Manchester, Connecticut 06040 (US)
LITTON, David A.
West Hartford, Connecticut 06107 (US)
DEPALMA, Joseph A.
Feeding Hills, Massachusetts 01030 (US)
NEAL, James W.
Ellington, Connecticut 06029 (US)
MALONEY, Michael
Marlborough, Connecticut 06447 (US)
BEERS, Russell, A.
Manchester, Connecticut 06040 (US)
HAZEL, Brian T.
Avon, Connecticut 06001 (US)
COTNOIR, Glenn A.
Thompson, Connecticut 06277 (US)

(74)	Representative: Dehns
	St. Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)

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References cited: :

EP-A1- 0 972 853
US-A- 5 856 027
US-A1- 2003 203 127
US-B1- 6 221 512

US-A- 5 087 477
US-A1- 2003 180 571
US-B1- 6 221 512

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).