| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
|
Designated Extension States: |
|
BA ME |
| (30) |
Priority: |
20.01.2014 US 201461929306 P
|
| (71) |
Applicant: Brooks Automation, Inc. |
|
Chelmsford, MA 01824 (US) |
|
| (72) |
Inventors: |
|
- AFFLECK, Rhett, L.
Poway, CA 92064 (US)
- BONORA, Anthony, C.
Portola Valley, CA 94028 (US)
- CROQUETTE, Etienne, P.
Altrincham
Cheshire WA14 4DA (GB)
- NEEPER, Robert, K.
Ramona, CA 92065 (US)
|
| (74) |
Representative: Maupilier, Didier |
|
Ipside
Boîte postale CS 40009
7-9 allées Haussmann
33070 Bordeaux Cedex
33070 Bordeaux Cedex (FR) |
|
