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(11)

EP 3 100 314 A1

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(43) Date of publication: 07.12.2016 Bulletin 2016/49 (21) Application number: 15743892.0 (22) Date of filing: 21.01.2015

(51) International Patent Classification (IPC):  H01L 51/52(2006.01) B82Y 40/00(2011.01) C23C 16/455(2006.01) B82Y 30/00(2011.01) B32B 18/00(2006.01) (86) International application number: PCT/FI2015/050032 (87) International publication number: WO 2015/114205 (06.08.2015 Gazette 2015/31)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 29.01.2014 GB 201401506 (71) Applicant: Nokia Technologies Oy 02610 Espoo (FI)	(72) Inventors: BORINI, Stefano Cambridge CB3 0JE (GB) BOTTOMLEY, Joseph Cambridge CB23 2SS (GB) BOWER, Chris Ely CB6 3EN (GB) (74) Representative: Nokia Corporation  Intellectual Property Department Karakaari 7 02610 Espoo 02610 Espoo (FI)