(19)
(11) EP 3 102 534 A1

(12)

(43) Date of publication:
14.12.2016 Bulletin 2016/50

(21) Application number: 15745967.8

(22) Date of filing: 06.02.2015
(51) International Patent Classification (IPC): 
B81C 1/00(2006.01)
B81B 1/00(2006.01)
(86) International application number:
PCT/SE2015/050130
(87) International publication number:
WO 2015/119564 (13.08.2015 Gazette 2015/32)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 07.02.2014 SE 1450135

(71) Applicant: Silex Microsystems AB
175 26 Järfälla (SE)

(72) Inventors:
  • WESTIN, Håkan
    S-746 91 Bålsta (SE)
  • WICKERT, Peter
    S-172 32 Sundbyberg (SE)

(74) Representative: Brann AB 
P.O. Box 3690 Drottninggatan 27
103 59 Stockholm
103 59 Stockholm (SE)

   


(54) CONTROLLING PRESSURE IN CAVITIES ON SUBSTRATES