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EP 3 105 762 A1

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(43) Date of publication: 21.12.2016 Bulletin 2016/51 (21) Application number: 15704513.9 (22) Date of filing: 11.02.2015

(51) International Patent Classification (IPC):  G11C 29/00(2006.01) H01L 51/00(2006.01) H01L 27/28(2006.01) G11C 11/56(2006.01) H01L 21/66(2006.01) H01L 27/12(2006.01) H01L 51/05(2006.01) G11C 13/00(2006.01) (86) International application number: PCT/EP2015/052858 (87) International publication number: WO 2015/121298 (20.08.2015 Gazette 2015/33)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 11.02.2014 US 201461938610 P (71) Applicants: IMEC vzw 3001 Leuven (BE) Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO 2595 DA 's-Gravenhage (NL)	(72) Inventors: MYNY, Kris Jef Ria B-3001 Leuven (BE) GELINCK, Gerwin B-3001 Leuven (BE) GENOE, Jan B-3001 Leuven (BE) (74) Representative: DenK iP  Hundelgemsesteenweg 1116 9820 Merelbeke 9820 Merelbeke (BE)