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(11)

EP 3 105 777 A1

(12)

(43) Date of publication: 21.12.2016 Bulletin 2016/51 (21) Application number: 15745915.7 (22) Date of filing: 10.02.2015

(51) International Patent Classification (IPC):  H01L 21/00(2006.01) H01L 21/465(2006.01) H01L 21/46(2006.01) (86) International application number: PCT/US2015/015112 (87) International publication number: WO 2015/120424 (13.08.2015 Gazette 2015/32)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 10.02.2014 US 201461937736 P (71) Applicant: Rensselaer Polytechnic Institute Troy, NY 12180 (US)	(72) Inventors: DAHAL, Rajendra P. Troy, New York 12180 (US) BHAT, Ishwara B. Troy, New York 12180 (US) CHOW, Tat-Sing Troy, New York 12180 (US) (74) Representative: Friese Goeden Patentanwälte PartGmbB  Widenmayerstraße 49 80538 München 80538 München (DE)