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(11)

EP 3 108 508 A1

(12)

(43) Date of publication: 28.12.2016 Bulletin 2016/52 (21) Application number: 14705372.2 (22) Date of filing: 20.02.2014

(51) International Patent Classification (IPC):  H01L 31/18(2006.01) H01L 21/677(2006.01) (86) International application number: PCT/EP2014/053352 (87) International publication number: WO 2015/124191 (27.08.2015 Gazette 2015/34)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (71) Applicant: Applied Materials Italia Srl 31048 San Biagio di Callalta (IT)	(72) Inventors: PIZZOLATO, Davide I-35010 Trebaseleghe (PD) (IT) ANDREOLA, Daniele I-31050 Povegliano (TV) (IT) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Josephspitalstr. 15 80331 München 80331 München (DE)