| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
| (30) |
Priority: |
25.02.2014 US 201461944366 P
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| (71) |
Applicant: Entegris, Inc. |
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Billerica, MA 01821 (US) |
|
| (72) |
Inventors: |
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- CHEN, Tianniu
Westford, Massachusetts 01886 (US)
- JIANG, Ping
Danbury, Connecticut 06810 (US)
- KORZENSKI, Michael B.
Bethel, Connecticut 06801 (US)
|
| (74) |
Representative: ABG Patentes, S.L. |
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Avenida de Burgos, 16D
Edificio Euromor
28036 Madrid
28036 Madrid (ES) |
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