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EP 3 120 377 A1

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(43) Date of publication: 25.01.2017 Bulletin 2017/04 (21) Application number: 15706621.8 (22) Date of filing: 11.02.2015

(51) International Patent Classification (IPC):  H01L 21/28(2006.01) H01L 27/12(2006.01) H01L 27/115(2017.01) H01L 29/423(2006.01) (86) International application number: PCT/US2015/015503 (87) International publication number: WO 2015/142440 (24.09.2015 Gazette 2015/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 17.03.2014 US 201414216553 (71) Applicant: Silicon Storage Technology Inc. San Jose, CA 95134 (US)	(72) Inventors: SU, Chien-Sheng Saratoga, CA 95070 (US) TADAYONI, Mandana Cupertino, CA 95014 (US) TRAN, Hieu Van San Jose, CA 95135 (US) DO, Nhan Saratoga, CA 95070 (US) (74) Representative: Betten & Resch  Patent- und Rechtsanwälte PartGmbB Maximiliansplatz 14 80333 München 80333 München (DE)