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(11)

EP 3 127 143 A1

(12)

(43) Date of publication: 08.02.2017 Bulletin 2017/06 (21) Application number: 15773434.4 (22) Date of filing: 16.02.2015

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 21/77(2017.01) H01L 21/64(2006.01) H01L 33/00(2010.01) (86) International application number: PCT/SG2015/000048 (87) International publication number: WO 2015/152817 (08.10.2015 Gazette 2015/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 31.03.2014 US 201461972575 P (71) Applicant: Nanyang Technological University Singapore 639798 (SG)	(72) Inventors: DEMIR, Hilmi Volkan Singapore 639798 (SG) TAN, Swee Tiam Singapore 639798 (SG) (74) Representative: Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte  Am Brauhaus 8 01099 Dresden 01099 Dresden (DE)