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(11)

EP 3 127 154 A1

(12)

(43) Date of publication: 08.02.2017 Bulletin 2017/06 (21) Application number: 15742923.4 (22) Date of filing: 30.01.2015

(51) International Patent Classification (IPC):  H01L 27/092(2006.01) H01L 21/8238(2006.01) (86) International application number: PCT/US2015/013989 (87) International publication number: WO 2015/117038 (06.08.2015 Gazette 2015/31)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 30.01.2014 US 201461933717 P 29.01.2015 US 201514608391 (71) Applicants: Texas Instruments Incorporated Dallas, TX 75265-5474 (US) Texas Instruments Japan Limited Tokyo 160-8366 (JP)	(72) Inventors: WANG, Jun Hellertown, PA 18055 (US) BAIOCCHI, Frank Allentown, PA 18104 (US) LIN, Haian Bethlehem, PA 18020 (US) (74) Representative: Zeller, Andreas  Texas Instruments Deutschland GmbH Haggertystraße 1 85356 Freising 85356 Freising (DE)